A method of measuring the velocity of slit based on machine vision

Man Chen; Zhijie Liao

doi:10.1117/12.2265250

23 January 2017 A method of measuring the velocity of slit based on machine vision

Man Chen, Zhijie Liao

Proceedings Volume 10322, Seventh International Conference on Electronics and Information Engineering; 103222U (2017) https://doi.org/10.1117/12.2265250
Event: Seventh International Conference on Electronics and Information Engineering, 2016, Nanjing, China

Abstract

In the lithography machine, there is a field diaphragm, which is a kind of edge structure. In the process of exposure, it is linearly synchronous movement with the die, so when developing the slit, it is necessary to measure its movement characteristics precisely. A method of velocity measurement based on machine vision is adopted, by detecting edge position in sequential images, and then through the transformation between image coordinate and world coordinate, the object displacement in real space is calculated and finally instantaneous velocity of the object is got. Firstly, through the simulation model in CODE V, correctness of the measurement principle is verified, Next, some error sources that affect the precision of the machine vision measurement system are analyzed, and corresponding solutions are given.

Citation Download Citation

Man Chen and Zhijie Liao "A method of measuring the velocity of slit based on machine vision", Proc. SPIE 10322, Seventh International Conference on Electronics and Information Engineering, 103222U (23 January 2017); https://doi.org/10.1117/12.2265250

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