Study on light scattering characterization for subsurface defect of optical element

Ailing Tian; Yingge Zhang; Yujun Tian; Chunhui Wang; Chunyang Wang

doi:10.1117/12.2267275

10 February 2017 Study on light scattering characterization for subsurface defect of optical element

Ailing Tian, Yingge Zhang, Yujun Tian, Chunhui Wang, Chunyang Wang

Proceedings Volume 10250, International Conference on Optical and Photonics Engineering (icOPEN 2016); 1025014 (2017) https://doi.org/10.1117/12.2267275
Event: Fourth International Conference on Optical and Photonics Engineering, 2016, Chengdu, China

Abstract

Aiming at the effect of converge laser light scattering caused by subsurface micro-defect, and the change rule of laser scattering modulation was studied. First, the geometry model is built by defect type; then, by finite element method based on electromagnetic theory, the scattering light intensity distribution and variation curve with different detection defect depth, which convergence light spot focus on, were researched by numerical simulation. Finally, simulation model was verified by comparing experiment. This research results are important to setup the mathematical relation between subsurface defect and light scattering, and realize quantitative detection for the subsurface defect of optical element.

Citation Download Citation

Ailing Tian, Yingge Zhang, Yujun Tian, Chunhui Wang, and Chunyang Wang "Study on light scattering characterization for subsurface defect of optical element", Proc. SPIE 10250, International Conference on Optical and Photonics Engineering (icOPEN 2016), 1025014 (10 February 2017); https://doi.org/10.1117/12.2267275

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available