Integrated lab-on-a-chip sensor using shallow silicon waveguide multimode interference (MMI) device

Mohamed Y. Elsayed; Aya O. Zaki; Yehea Ismail; Mohamed A. Swillam

doi:10.1117/12.2254414

16 February 2017 Integrated lab-on-a-chip sensor using shallow silicon waveguide multimode interference (MMI) device

Mohamed Y. Elsayed, Aya O. Zaki, Yehea Ismail, Mohamed A. Swillam

Proceedings Volume 10106, Integrated Optics: Devices, Materials, and Technologies XXI; 101060X (2017) https://doi.org/10.1117/12.2254414
Event: SPIE OPTO, 2017, San Francisco, California, United States

Abstract

The objective of this work was to develop an integrated general purpose label-free optical sensor using standard photolithography on silicon-on-insulator platform for lab on chip applications. Shallow silicon waveguides have weak confinement in the silicon with lots of field in the cladding. This is advantageous in sensor applications due to the high light matter interaction. Here, we use our shallow strip waveguide platform to design a sensor employing a multimode interference (MMI) section. Utilizing a multi-mode section as short as 4 mm, the sensor exhibits sensitivity ranging from 417 nm / RIU to 427 nm / RIU with a figure of merit from 32 to 133.

Conference Presentation

Citation Download Citation

Mohamed Y. Elsayed, Aya O. Zaki, Yehea Ismail, and Mohamed A. Swillam "Integrated lab-on-a-chip sensor using shallow silicon waveguide multimode interference (MMI) device", Proc. SPIE 10106, Integrated Optics: Devices, Materials, and Technologies XXI, 101060X (16 February 2017); https://doi.org/10.1117/12.2254414

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