Nanostructuring of sapphire using time-modulated nanosecond laser pulses

P. Lorenz; I. Zagoranskiy; M. Ehrhardt; L. Bayer; K. Zimmer

doi:10.1117/12.2251826

17 February 2017 Nanostructuring of sapphire using time-modulated nanosecond laser pulses

P. Lorenz, I. Zagoranskiy, M. Ehrhardt, L. Bayer, K. Zimmer

Proceedings Volume 10092, Laser-based Micro- and Nanoprocessing XI; 100921P (2017) https://doi.org/10.1117/12.2251826
Event: SPIE LASE, 2017, San Francisco, California, United States

Abstract

The nanostructuring of dielectric surfaces using laser radiation is still a challenge. The IPSM-LIFE (laser-induced front side etching using in-situ pre-structured metal layer) method allows the easy, large area and fast laser nanostructuring of dielectrics. At IPSM-LIFE a metal covered dielectric is irradiated where the structuring is assisted by a self-organized molten metal layer deformation process. The IPSM-LIFE can be divided into two steps:

STEP 1: The irradiation of thin metal layers on dielectric surfaces results in a melting and nanostructuring process of the metal layer and partially of the dielectric surface.

STEP 2: A subsequent high laser fluence treatment of the metal nanostructures result in a structuring of the dielectric surface. At this study a sapphire substrate Al₂O₃(1-102) was covered with a 10 nm thin molybdenum layer and irradiated by an infrared laser with an adjustable time-dependent pulse form with a time resolution of 1 ns (wavelength λ = 1064 nm, pulse duration Δt_p = 1 – 600 ns, Gaussian beam profile). The laser treatment allows the fabrication of different surface structures into the sapphire surface due to a pattern transfer process. The resultant structures were investigated by scanning electron microscopy (SEM). The process was simulated and the simulation results were compared with experimental results.

Citation Download Citation

P. Lorenz, I. Zagoranskiy, M. Ehrhardt, L. Bayer, and K. Zimmer "Nanostructuring of sapphire using time-modulated nanosecond laser pulses", Proc. SPIE 10092, Laser-based Micro- and Nanoprocessing XI, 100921P (17 February 2017); https://doi.org/10.1117/12.2251826

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