Multi-wavelength VCSEL arrays using high-contrast gratings

Erik Haglund; Johan S. Gustavsson; Wayne V. Sorin; Jörgen Bengtsson; David Fattal; Åsa Haglund; Michael Tan; Anders Larsson

doi:10.1117/12.2256348

20 February 2017 Multi-wavelength VCSEL arrays using high-contrast gratings

Erik Haglund, Johan S. Gustavsson, Wayne V. Sorin, Jörgen Bengtsson, David Fattal, Åsa Haglund, Michael Tan, Anders Larsson

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Proceedings Volume 10113, High Contrast Metastructures VI; 101130B (2017) https://doi.org/10.1117/12.2256348
Event: SPIE OPTO, 2017, San Francisco, California, United States

Abstract

The use of a high-contrast grating (HCG) as the top mirror in a vertical-cavity surface-emitting laser (VCSEL) allows for setting the resonance wavelength by the grating parameters in a post-epitaxial growth fabrication process. Using this technique, we demonstrate electrically driven multi-wavelength VCSEL arrays at ~980 nm wavelength. The VCSELs are GaAs-based and the suspended GaAs HCGs were fabricated using electron-beam lithography, dry etching and selective removal of an InGaP sacrificial layer. The air-coupled cavity design enabled 4-channel arrays with 5 nm wavelength spacing and sub-mA threshold currents thanks to the high HCG reflectance.

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Erik Haglund, Johan S. Gustavsson, Wayne V. Sorin, Jörgen Bengtsson, David Fattal, Åsa Haglund, Michael Tan, and Anders Larsson "Multi-wavelength VCSEL arrays using high-contrast gratings", Proc. SPIE 10113, High Contrast Metastructures VI, 101130B (20 February 2017); https://doi.org/10.1117/12.2256348

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