Characteristics of amplitude modulation cantilever sensor with optical waveguide in liquid

Kyung Woon Lee; Jinsik Kim; Dong-ho Lee; Myung-Sic Chae; Kyo Seon Hwang; Jung Ho Park

doi:10.1117/12.2251817

20 February 2017 Characteristics of amplitude modulation cantilever sensor with optical waveguide in liquid

Kyung Woon Lee, Jinsik Kim, Dong-ho Lee, Myung-Sic Chae, Kyo Seon Hwang, Jung Ho Park

Proceedings Volume 10116, MOEMS and Miniaturized Systems XVI; 101160P (2017) https://doi.org/10.1117/12.2251817
Event: SPIE OPTO, 2017, San Francisco, California, United States

Abstract

We present the basic characteristics of amplitude modulation cantilever with optical waveguide in liquid. This optical waveguide cantilever-based transducer can be used for small particle detection or biological sensing in liquid environments. Essentially, the SiON waveguide embedded in the SiO² cantilever is designed and fabricated to detect the biomolecular interaction or small particle in the liquid. For a measurement, the actuation based on amplitude modulation is applied for a stable oscillation of the cantilever in liquid environment. Finally, modulated output signal of optical waveguide cantilever were measured and analyzed.

Conference Presentation

Citation Download Citation

Kyung Woon Lee, Jinsik Kim, Dong-ho Lee, Myung-Sic Chae, Kyo Seon Hwang, and Jung Ho Park "Characteristics of amplitude modulation cantilever sensor with optical waveguide in liquid", Proc. SPIE 10116, MOEMS and Miniaturized Systems XVI, 101160P (20 February 2017); https://doi.org/10.1117/12.2251817

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