Beam shaping by spatial light modulator and 4f system to square and top-flat for interference laser processing

Kazuhito Osawa; Masataka Yoshida; Yoshiki Nakata; Noriaki Miyanaga; Aiko Narazaki; Tatsuya Shoji; Yasuyuki Tsuboi

doi:10.1117/12.2253983

27 February 2017 Beam shaping by spatial light modulator and 4f system to square and top-flat for interference laser processing

Kazuhito Osawa, Masataka Yoshida, Yoshiki Nakata, Noriaki Miyanaga, Aiko Narazaki, Tatsuya Shoji, Yasuyuki Tsuboi

Author Affiliations +

Proceedings Volume 10091, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII; 100911C (2017) https://doi.org/10.1117/12.2253983
Event: SPIE LASE, 2017, San Francisco, California, United States

Abstract

We demonstrated beam shaping to top-flat and square by phase-only Spatial Light Modulator (SLM) and spatial frequency filtering. Spatial phase distribution of a femtosecond laser beam was modulated by a phase grating pattern reflecting a transfer function for beam shaping. By filtering the higher spatial frequency component at Fourier plane in 4f system, the spatial amplitude distribution of the zero-order beam was shaped to top-flat and square. This result enables us to fabricate large area and uniform devices by using multi-shot processing.

Citation Download Citation

Kazuhito Osawa, Masataka Yoshida, Yoshiki Nakata, Noriaki Miyanaga, Aiko Narazaki, Tatsuya Shoji, and Yasuyuki Tsuboi "Beam shaping by spatial light modulator and 4f system to square and top-flat for interference laser processing", Proc. SPIE 10091, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII, 100911C (27 February 2017); https://doi.org/10.1117/12.2253983

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