Fabrication of the asymmetric double-sided concave microlens arrays by femtosecond laser

Fan Zhang; Qing Yang; Hao Bian; Feng Chen

doi:10.1117/12.2257841

28 February 2017 Fabrication of the asymmetric double-sided concave microlens arrays by femtosecond laser

Fan Zhang, Qing Yang, Hao Bian, Feng Chen

Proceedings Volume 10256, Second International Conference on Photonics and Optical Engineering; 102563Q (2017) https://doi.org/10.1117/12.2257841
Event: Second International Conference on Photonics and Optical Engineering, 2016, Xi'an, China

Abstract

In the last decades, fabrication of microlens array in materials with high-damage threshold has attracted increasing interest, especially in the application of high-power laser. In this paper, we propose an advanced strategy to efficiently fabricate microlens array on the surface of glass using a single-pulsed femtosecond laser wet etch process, which is a combination of high-speed laser scanning and the subsequent chemical etch with HF solution. Based on this method, double-sided microlens array, non-regular arrays consisting of close-packed concave microlens array on one side and regular concave MLA on the other side, were fabricated on the 1cm*1cm glass. Especially over one million microlenses could be acquired within an hour, exhibiting great superiority in practical application. Moreover, the optical properties of the asymmetric double-sided MLA were experimentally characterized, and the experimental results reveal the good light homogenization performance.

Citation Download Citation

Fan Zhang, Qing Yang, Hao Bian, and Feng Chen "Fabrication of the asymmetric double-sided concave microlens arrays by femtosecond laser", Proc. SPIE 10256, Second International Conference on Photonics and Optical Engineering, 102563Q (28 February 2017); https://doi.org/10.1117/12.2257841

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available