Discussion on method of optical surface roughness measurement

Chunyang Wang; Dongmei Lv; Hongwei Shi; Xuelian Liu; Ruihao Xin

doi:10.1117/12.2260711

28 February 2017 Discussion on method of optical surface roughness measurement

Chunyang Wang, Dongmei Lv, Hongwei Shi, Xuelian Liu, Ruihao Xin

Proceedings Volume 10256, Second International Conference on Photonics and Optical Engineering; 1025654 (2017) https://doi.org/10.1117/12.2260711
Event: Second International Conference on Photonics and Optical Engineering, 2016, Xi'an, China

Abstract

In recent years, with the development of modern optics and laser technology, modern industry for optical surface roughness measurement precision of the increasingly high demand, real-time, fast and precise measurement of surface roughness has become constant subject of optical components in processing and test. In this paper, the current method of measuring the surface roughness of optical components were described in detail, including light scattering method, interferometric method, speckle method, and optical stylus method. Besides, the principles and characteristics of different methods were introduced respectively.

Citation Download Citation

Chunyang Wang, Dongmei Lv, Hongwei Shi, Xuelian Liu, and Ruihao Xin "Discussion on method of optical surface roughness measurement", Proc. SPIE 10256, Second International Conference on Photonics and Optical Engineering, 1025654 (28 February 2017); https://doi.org/10.1117/12.2260711

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