Free energy modeling of block-copolymer within pillar confinements on DSA lithography

Seokhan Park; Joonsoo Park; Jemin Park; Hyun-Woo Kim; Changhyun Cho; Hyeongsun Hong; Kyupil Lee; ES Jung

doi:10.1117/12.2257638

21 March 2017 Free energy modeling of block-copolymer within pillar confinements on DSA lithography

Seokhan Park, Joonsoo Park, Jemin Park, Hyun-Woo Kim, Changhyun Cho, Hyeongsun Hong, Kyupil Lee, ES Jung

Proceedings Volume 10144, Emerging Patterning Technologies; 101440F (2017) https://doi.org/10.1117/12.2257638
Event: SPIE Advanced Lithography, 2017, San Jose, California, United States

Abstract

To a major candidate and beyond, directed self-assembly (DSA) lithography is investigated on DRAM contact-hole fabrication. We perform a systematic study about behavior of asymmetric PS-b-PMMA block copolymers (BCP) within pillar confinement for DSA and find that selectively removed PMMA contact domain has a different morphology according to chemically modified pillar surfaces. We calculate the perturbation of PMMA contacts by pillar diameter using free energy magnitude model. This established model provides practical engineering insight for present pillar scheme and future graphoepitaxial self-assembly techniques for semiconductor DSA procedure.

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Citation Download Citation

Seokhan Park, Joonsoo Park, Jemin Park, Hyun-Woo Kim, Changhyun Cho, Hyeongsun Hong, Kyupil Lee, and ES Jung "Free energy modeling of block-copolymer within pillar confinements on DSA lithography", Proc. SPIE 10144, Emerging Patterning Technologies, 101440F (21 March 2017); https://doi.org/10.1117/12.2257638

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