Novel spin on planarization technology by photo curing SOC (P-SOC)

Takafumi Endo; Rikimaru Sakamoto; Keisuke Hashimoto; Daigo Saito; Hirokazu Nishimaki; Ryo Karasawa; Hikaru Tokunaga

doi:10.1117/12.2257974

27 March 2017 Novel spin on planarization technology by photo curing SOC (P-SOC)

Takafumi Endo, Rikimaru Sakamoto, Keisuke Hashimoto, Daigo Saito, Hirokazu Nishimaki, Ryo Karasawa, Hikaru Tokunaga

Proceedings Volume 10146, Advances in Patterning Materials and Processes XXXIV; 1014625 (2017) https://doi.org/10.1117/12.2257974
Event: SPIE Advanced Lithography, 2017, San Jose, California, United States

Abstract

In advanced lithography technology, high planarity SOC (Spin-on-Carbon) materials which can planarize topography substrates are required in order to obtain enough process margin. We developed photo curing SOC (P-SOC) materials which can be cross-link by short wavelength UV light, but not thermal process. The P-SOC can achieve high planarization and good via filling because they have high reflow performance without viscosity increasing by baking process and almost no film shrinkage during the baking and photo curing process. The novel P-SOC materials are suitable for very fine pattern manufacturing process as N5 generation which is needed planarization technology.

Citation Download Citation

Takafumi Endo, Rikimaru Sakamoto, Keisuke Hashimoto, Daigo Saito, Hirokazu Nishimaki, Ryo Karasawa, and Hikaru Tokunaga "Novel spin on planarization technology by photo curing SOC (P-SOC)", Proc. SPIE 10146, Advances in Patterning Materials and Processes XXXIV, 1014625 (27 March 2017); https://doi.org/10.1117/12.2257974

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