SPIE Proceedings | Volume 10145 | Future >

Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

Metrology capabilities and needs for 7nm and 5nm logic nodes

[+] Author Affiliations
Benjamin Bunday, Eric Solecky, Alok Vaid, A. F. Bello, Xintuo Dai

GLOBALFOUNDRIES Inc. (United States)

Proc. SPIE 10145, Metrology, Inspection, and Process Control for Microlithography XXXI, 101450G (March 28, 2017); doi:10.1117/12.2260870
Text Size: A A A
From Conference Volume 10145

  • Metrology, Inspection, and Process Control for Microlithography XXXI
  • Martha I. Sanchez; Vladimir A. Ukraintsev
  • San Jose, California, United States | February 26, 2017
Abstract
References

abstract

This paper will provide a high level overview of the future for in-line high volume manufacturing (HVM) metrology for the semiconductor industry, concentrating on logic applications. First, we will take a broad view of the needs of patterned defect, critical dimensional (CD/3D), overlay and films metrology, and present the extensive list of applications for which metrology solutions are needed. Commonalities and differences among the various applications will be shown. We will then report on the gating technical limits of the most important of these metrology solutions to address the metrology challenges of future nodes, highlighting key metrology technology gaps requiring industry attention and investment © (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation

Benjamin Bunday ; Eric Solecky ; Alok Vaid ; A. F. Bello and Xintuo Dai
" Metrology capabilities and needs for 7nm and 5nm logic nodes ", Proc. SPIE 10145, Metrology, Inspection, and Process Control for Microlithography XXXI, 101450G (March 28, 2017); doi:10.1117/12.2260870; http://dx.doi.org/10.1117/12.2260870


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

MultiMedia


NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).
Compression-Only CPR: Pushing the Science Forward
Cone
AAM 2010;304:1493-1495.
All you need to read in the other general jounals
BMJ 2010;341:c5893-c1494.

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
SPIE © 1962 - 2017. All Rights Reserved.
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.