High-throughput multi-beam SEM: quantitative analysis of imaging capabilities at IMEC-N10 logic node

J. T. Neumann; T. Garbowski; W. Högele; T. Korb; S. Halder; P. Leray; R. Garreis; M. le Maire; D. Zeidler

doi:10.1117/12.2257980

28 March 2017 High-throughput multi-beam SEM: quantitative analysis of imaging capabilities at IMEC-N10 logic node

J. T. Neumann, T. Garbowski, W. Högele, T. Korb, S. Halder, P. Leray, R. Garreis, M. le Maire, D. Zeidler

Proceedings Volume 10145, Metrology, Inspection, and Process Control for Microlithography XXXI; 101451S (2017) https://doi.org/10.1117/12.2257980
Event: SPIE Advanced Lithography, 2017, San Jose, California, United States

Abstract

We use the ZEISS MultiSEM to inspect patterns on separated chips of a semiconductor wafer suited for process window characterization at imec-N10 logic node. We systematically analyze the impact of imaging parameters of the MultiSEM on quantitative metrics extracted from the images, e.g., CD repeatability and relative defect capture, and demonstrate that the MultiSEM is able to image the wafer patterns, track their variations through the process conditions of the lithography scanner, and consistently find patterning defects limiting the lithographic process window.

Conference Presentation

Citation Download Citation

J. T. Neumann, T. Garbowski, W. Högele, T. Korb, S. Halder, P. Leray, R. Garreis, M. le Maire, and D. Zeidler "High-throughput multi-beam SEM: quantitative analysis of imaging capabilities at IMEC-N10 logic node", Proc. SPIE 10145, Metrology, Inspection, and Process Control for Microlithography XXXI, 101451S (28 March 2017); https://doi.org/10.1117/12.2257980

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available