A new hybrid piezo-actuated compliant mechanism with self-tuned flexure arm

Mingxiang Ling; Junyi Cao

doi:10.1117/12.2260448

10 April 2017 A new hybrid piezo-actuated compliant mechanism with self-tuned flexure arm

Mingxiang Ling, Junyi Cao

Proceedings Volume 10172, A Tribute Conference Honoring Daniel Inman; 101720G (2017) https://doi.org/10.1117/12.2260448
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2017, Portland, Oregon, United States

Abstract

Recent interests and demands for developing video-rate atomic force microscopes, high-throughput probe-based nanofabrication and high-frequency vibration generator for assisted-machining are increasingly posing new challenges for designing high-bandwidth and large-range piezo-actuated compliant mechanisms. The previous studies mainly focused on making the trade-off between natural frequency and motion range by designing a proper topology. Differing from the previous works, this paper attempts to break the deadlock by employing both piezo-stacks and piezoelectric patches to actuate compliant mechanisms. In this method, piezo-stacks provide an actuating force similar to the traditional way, while piezoelectric patches are bonded on the surface of the flexure arms in compliant mechanisms. These ‘active’ laminaes are used to further actuate the hosting flexural beam by inducing strains on the interface and then give additional bending moments to the flexural arms, which enlarge the output displacement of the compliant mechanism while without the sacrifice of natural frequency. An analytical formulation is established to illustrate the new driving principle and the compound static behaviour of a specific hybrid piezo-actuated multistage compliant mechanism. Initial prototype is also manufactured and experimentally testing is conducted to verify the feasibility of the method.

Conference Presentation

Citation Download Citation

Mingxiang Ling and Junyi Cao "A new hybrid piezo-actuated compliant mechanism with self-tuned flexure arm", Proc. SPIE 10172, A Tribute Conference Honoring Daniel Inman, 101720G (10 April 2017); https://doi.org/10.1117/12.2260448

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available