Fabrication of semiconductor microspheres with laser ablation in superfluid helium

Yosuke Minowa; Yuya Oguni; Masaaki Ashida

doi:10.1117/12.2274888

18 April 2017 Fabrication of semiconductor microspheres with laser ablation in superfluid helium

Yosuke Minowa, Yuya Oguni, Masaaki Ashida

Proceedings Volume 10252, Optical Manipulation Conference; 102520N (2017) https://doi.org/10.1117/12.2274888
Event: SPIE Technologies and Applications of Structured Light, 2017, Yokohama, Japan

Abstract

We fabricated semiconductor ZnO microspheres via the pulsed laser ablation in the superfluid helium. The scanning electron microscope observation revealed the high sphericity and smooth surface. We also observed whispering gallery mode resonances, the electromagnetic eigenmode resonances within the microspheres, in the cathodoluminescence spectrum, verifying the high symmetry of the fabricated microspheres. Further, we cross-sectioned the microspheres with using focused ion beam. The scanning electron microscope observation of the cross section uncovers the existence of small holes within the microspheres. The inner structure examination helps us to understand the microscopic mechanism of our fabrication method.

Citation Download Citation

Yosuke Minowa, Yuya Oguni, and Masaaki Ashida "Fabrication of semiconductor microspheres with laser ablation in superfluid helium", Proc. SPIE 10252, Optical Manipulation Conference, 102520N (18 April 2017); https://doi.org/10.1117/12.2274888

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