Novel vacuum packaged 384 x 288 broadband bolometer FPA with enhanced absorption in the 3-14 µm wavelength range

Bruno Fisette; Mathieu Tremblay; Hassane Oulachgar; Francis Généreux; David Béland; Patrick Beaupré; Christian Julien; David Gay; Sébastien Deshaies; Marc Terroux; Bruno Tremblay; Denis Dufour; Christine Alain

doi:10.1117/12.2255747

3 May 2017 Novel vacuum packaged 384×288 broadband bolometer FPA with enhanced absorption in 3-14μm wavelength range

Bruno Fisette, Mathieu Tremblay, Hassane Oulachgar, Francis Généreux, David Béland, Patrick Beaupré, Christian Julien, David Gay, Sébastien Deshaies, Marc Terroux, Bruno Tremblay, Denis Dufour, Christine Alain

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Proceedings Volume 10177, Infrared Technology and Applications XLIII; 101771R (2017) https://doi.org/10.1117/12.2255747
Event: SPIE Defense + Security, 2017, Anaheim, CA, United States

Abstract

This paper reports on the development of a fully packaged focal plane array of broadband microbolometers. The detector makes use of a gold black thin film to expand its absorption range from 3 to 14 μm. A low temperature packaging process was developed to minimize sintering of the gold black absorber during vacuum sealing of the bolometer array package. The gold black absorber was also laser trimmed to prevent lateral diffusion of heat and promote a better MTF. The resulting FPAs show a NETD lower than 25 mK at a frame rate of 50 Hz

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Bruno Fisette, Mathieu Tremblay, Hassane Oulachgar, Francis Généreux, David Béland, Patrick Beaupré, Christian Julien, David Gay, Sébastien Deshaies, Marc Terroux, Bruno Tremblay, Denis Dufour, and Christine Alain "Novel vacuum packaged 384×288 broadband bolometer FPA with enhanced absorption in 3-14μm wavelength range", Proc. SPIE 10177, Infrared Technology and Applications XLIII, 101771R (3 May 2017); https://doi.org/10.1117/12.2255747

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KEYWORDS

Indium oxide

Packaging

Sensors

Microbolometers

Bolometers

Modulation transfer functions

Absorption

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