Millisecond laser induced thermal stress on GaAs wafer

Bohua Li; Zhonghua Shen; Jian Lu; Xiaowu Ni

doi:10.1117/12.2268163

12 May 2017 Millisecond laser induced thermal stress on GaAs wafer

Bohua Li, Zhonghua Shen, Jian Lu, Xiaowu Ni

Proceedings Volume 10173, Fourth International Symposium on Laser Interaction with Matter; 1017304 (2017) https://doi.org/10.1117/12.2268163
Event: 4th International Symposium on Laser Interaction with Matter, 2016, Chengdu, China

Abstract

In order to investigate the thermal stresses field of GaAs during the millisecond pulsed laser irradiation, a 3D numerical model has been established based on the thermoelastic theory with the finite element method (FEM). T he 12 slip systems can be obtained to describe the dynamic change process of resolved shear stress field of GaAs during the laser irradiation. The results show that the thermal slips are firstly activated below the spot area of laser when the thermal shear stresses of slip systems surpass the critical yield stress, and this comes out before the melting of GaAs surface. Brittle cracks occur in the initiation points offered by the thermal slips, and this can greatly reduce the photoelectric performance of GaAs. The calculated stresses distribution indicate that the fracture mostly occurs at the boundary of the laser spot and the center, which is consistent with the experimental result.

Citation Download Citation

Bohua Li, Zhonghua Shen, Jian Lu, and Xiaowu Ni "Millisecond laser induced thermal stress on GaAs wafer", Proc. SPIE 10173, Fourth International Symposium on Laser Interaction with Matter, 1017304 (12 May 2017); https://doi.org/10.1117/12.2268163

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available