DUV high power lasers processing for glass and CFRP

Masakazu Kobayashi; Kouji Kakizaki; Hiroaki Oizumi; Toshio Mimura; Junichi Fujimoto; Hakaru Mizoguchi

doi:10.1117/12.2266233

16 May 2017 DUV high power lasers processing for glass and CFRP

Masakazu Kobayashi, Kouji Kakizaki, Hiroaki Oizumi, Toshio Mimura, Junichi Fujimoto, Hakaru Mizoguchi

Proceedings Volume 10238, High-Power, High-Energy, and High-Intensity Laser Technology III; 102381D (2017) https://doi.org/10.1117/12.2266233
Event: SPIE Optics + Optoelectronics, 2017, Prague, Czech Republic

Abstract

A laser processing is widely applied to cutting, drilling, welding, bending and surface treatment in industry. Lasers with a wavelength of 1 μm are mainly used and the processing is realized by melting materials. This thermal process has a high productivity but the processed surface is hard to use for precision machining. This report is focusing on two materials which are classified in wide band gap. Ablation rate was measured with a laser microscope and an optical one. Excimer laser is expected to be a useful tool for these materials

Citation Download Citation

Masakazu Kobayashi, Kouji Kakizaki, Hiroaki Oizumi, Toshio Mimura, Junichi Fujimoto, and Hakaru Mizoguchi "DUV high power lasers processing for glass and CFRP", Proc. SPIE 10238, High-Power, High-Energy, and High-Intensity Laser Technology III, 102381D (16 May 2017); https://doi.org/10.1117/12.2266233

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