Experimental study of laser trimmed surface acoustic wave delay line topologies

Dmitry Lukyanov; Sergey Shevchenko; Alexander Kukaev; Daniil Safronov

doi:10.1117/12.2265675

16 May 2017 Experimental study of laser trimmed surface acoustic wave delay line topologies

Dmitry Lukyanov, Sergey Shevchenko, Alexander Kukaev, Daniil Safronov

Proceedings Volume 10231, Optical Sensors 2017; 102311T (2017) https://doi.org/10.1117/12.2265675
Event: SPIE Optics + Optoelectronics, 2017, Prague, Czech Republic

Abstract

Laser ablation technique is promising for production of surface acoustic wave (SAW) sensors complicated topologies. Its main advantages in comparison to a photolithography method are: simplicity in pattern creation, no need in photomasks, possible to work with thick metallization (up to 20 μm), possibility to correct topology after the sensor sealing and others. This work discusses possible error sources, including side heating of metal films, and presents results of first characteristics evaluation for experimental delay lines produced by laser technology.

Citation Download Citation

Dmitry Lukyanov, Sergey Shevchenko, Alexander Kukaev, and Daniil Safronov "Experimental study of laser trimmed surface acoustic wave delay line topologies", Proc. SPIE 10231, Optical Sensors 2017, 102311T (16 May 2017); https://doi.org/10.1117/12.2265675

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