Development of an algorithm of the decision of the inverse ellipsometry problem for multilayer structure of the matrix receiver of optical radiation

Anastasiya Y. Lobanova; Victoria A. Ryzhova; Valery V. Korotaev; Victor M. Denisov

doi:10.1117/12.2265860

16 May 2017 Development of an algorithm of the decision of the inverse ellipsometry problem for multilayer structure of the matrix receiver of optical radiation

Anastasiya Y. Lobanova, Victoria A. Ryzhova, Valery V. Korotaev, Victor M. Denisov

Author Affiliations +

Proceedings Volume 10231, Optical Sensors 2017; 1023124 (2017) https://doi.org/10.1117/12.2265860
Event: SPIE Optics + Optoelectronics, 2017, Prague, Czech Republic

Abstract

The work is dedicated to the ellipsometric research of the pixel transparent structure within the matrix receiver of the optical radiation. The receiver consists of the four transparent layers ( for the colour sensor) and the three layers ( for the black-and-white sensor). Also the work concerns the measuring of the ellipsometric radiation options reflected from the surface layers of the sensitive element; in addition the work is about the receiving of the entering data to solve the inverse ellipsometric problem and the geometrical and optical calculation of the options of the multilayer structure. The diven work presents the iterative algorithm to solve the inverse ellipsometric problem, the method of the experimental researching and the measuring results of the polarization characteristics of the reflected radiation in according to the inside and the outside samples’ options.

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Anastasiya Y. Lobanova, Victoria A. Ryzhova, Valery V. Korotaev, and Victor M. Denisov "Development of an algorithm of the decision of the inverse ellipsometry problem for multilayer structure of the matrix receiver of optical radiation", Proc. SPIE 10231, Optical Sensors 2017, 1023124 (16 May 2017); https://doi.org/10.1117/12.2265860

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