Soft x-ray nanoscale imaging using highly brilliant laboratory sources and new detector concepts

H. Stiel; J. Braenzel; A. Dehlinger; R. Jung; A. Luebcke; M. Regehly; S. Ritter; J. Tuemmler; M. Schnuerer; C. Seim

doi:10.1117/12.2264222

17 May 2017 Soft x-ray nanoscale imaging using highly brilliant laboratory sources and new detector concepts

H. Stiel, J. Braenzel, A. Dehlinger, R. Jung, A. Luebcke, M. Regehly, S. Ritter, J. Tuemmler, M. Schnuerer, C. Seim

Proceedings Volume 10243, X-ray Lasers and Coherent X-ray Sources: Development and Applications; 1024309 (2017) https://doi.org/10.1117/12.2264222
Event: SPIE Optics + Optoelectronics, 2017, Prague, Czech Republic

Abstract

In this contribution, we report about nanoscale imaging using a laser produced plasma source based laboratory transmission X-ray microscope (LTXM) in the water window. The highly brilliant soft X-ray radiation of the LTXM is provided by a laser-produced nitrogen plasma source focused by a multilayer condenser mirror to the sample. An objective zone plate maps the magnified image of the sample on the super resolution camera. This camera employs a deep cooled soft-X-ray CCD imaging sensor sandwiched with a xy piezo stage to allow subpixel displacements of the detector. The camera is read out using a very low noise electronics platform, also directing low µm shifts of the sensor between subsequent image acquisitions. Finally an algorithm computes a high resolution image from the individual shifted low-resolution image frames.

Citation Download Citation

H. Stiel, J. Braenzel, A. Dehlinger, R. Jung, A. Luebcke, M. Regehly, S. Ritter, J. Tuemmler, M. Schnuerer, and C. Seim "Soft x-ray nanoscale imaging using highly brilliant laboratory sources and new detector concepts", Proc. SPIE 10243, X-ray Lasers and Coherent X-ray Sources: Development and Applications, 1024309 (17 May 2017); https://doi.org/10.1117/12.2264222

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