Soft x-ray imaging with incoherent sources

P. Wachulak; A. Torrisi; M. Ayele; A. Bartnik; J. Czwartos; Ł. Węgrzyński; T. Fok; T. Parkman; Š. Vondrová; J. Turnová; M. Odstrcil; H. Fiedorowicz

doi:10.1117/12.2265093

17 May 2017 Soft x-ray imaging with incoherent sources

P. Wachulak, A. Torrisi, M. Ayele, A. Bartnik, J. Czwartos, Ł. Węgrzyński, T. Fok, T. Parkman, Š. Vondrová, J. Turnová, M. Odstrcil, H. Fiedorowicz

Author Affiliations +

Proceedings Volume 10243, X-ray Lasers and Coherent X-ray Sources: Development and Applications; 102430O (2017) https://doi.org/10.1117/12.2265093
Event: SPIE Optics + Optoelectronics, 2017, Prague, Czech Republic

Abstract

In this work we present experimental, compact desk-top SXR microscope, the EUV microscope which is at this stage a technology demonstrator, and finally, the SXR contact microscope. The systems are based on laser-plasma EUV and SXR sources, employing a double stream gas puff target. The EUV and SXR full field microscopes, operating at 13.8 nm and 2.88 nm wavelengths, respectively, are capable of imaging nanostructures with a sub-50 nm spatial resolution with relatively short (seconds) exposure times. The SXR contact microscope operates in the “water-window” spectral range, to produce an imprint of the internal structure of the sample in a thin layer of SXR light sensitive photoresist. Applications of such desk-top EUV and SXR microscopes for studies of variety of different samples – test objects for resolution assessment and other objects such as carbon membranes, DNA plasmid samples, organic and inorganic thin layers, diatoms, algae and carcinoma cells, are also presented. Details about the sources, the microscopes as well as the imaging results for various objects will be presented and discussed. The development of such compact imaging systems may be important to the new research related to biological, material science and nanotechnology applications.

Conference Presentation

Citation Download Citation

P. Wachulak, A. Torrisi, M. Ayele, A. Bartnik, J. Czwartos, Ł. Węgrzyński, T. Fok, T. Parkman, Š. Vondrová, J. Turnová, M. Odstrcil, and H. Fiedorowicz "Soft x-ray imaging with incoherent sources", Proc. SPIE 10243, X-ray Lasers and Coherent X-ray Sources: Development and Applications, 102430O (17 May 2017); https://doi.org/10.1117/12.2265093

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available