Optimal design of a microgripper-type actuator based on AlN/Si heterogeneous bimorph

D. Ruiz; A. Díaz-Molina; O. Sigmund; A. Donoso; J. C. Bellido; J. L. Sánchez-Rojas

doi:10.1117/12.2266498

30 May 2017 Optimal design of a microgripper-type actuator based on AlN/Si heterogeneous bimorph

D. Ruiz, A. Díaz-Molina, O. Sigmund, A. Donoso, J. C. Bellido, J. L. Sánchez-Rojas

Proceedings Volume 10246, Smart Sensors, Actuators, and MEMS VIII; 1024606 (2017) https://doi.org/10.1117/12.2266498
Event: SPIE Microtechnologies, 2017, Barcelona, Spain

Abstract

This work presents a systematic procedure to design piezoelectrically actuated microgrippers. Topology optimization combined with optimal design of electrodes is used to maximize the displacement at the output port of the gripper. The fabrication at the microscale leads us to overcome an important issue: the difficulty of placing a piezoelectric film on both top and bottom of the host layer. Due to the non-symmetric lamination of the structure, an out-of-plane bending spoils the behaviour of the gripper. Suppression of this out-of-plane deformation is the main novelty introduced. In addition, a robust formulation approach is used in order to control the length scale in the whole domain and to reduce sensitivity of the designs to small manufacturing errors.

Conference Presentation

Citation Download Citation

D. Ruiz, A. Díaz-Molina, O. Sigmund, A. Donoso, J. C. Bellido, and J. L. Sánchez-Rojas "Optimal design of a microgripper-type actuator based on AlN/Si heterogeneous bimorph", Proc. SPIE 10246, Smart Sensors, Actuators, and MEMS VIII, 1024606 (30 May 2017); https://doi.org/10.1117/12.2266498

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