Optimization of microroughness of replicated x-ray optics

Lenka Mikulickova; Ladislav Pina; Adolf Inneman; Daniela Doubravova; Veronika Marsikova; Ladislav Sieger; Martin Urban; Veronika Stehliková; Ondrej Nentvich; Jaromir Mirovsky

doi:10.1117/12.2265810

31 May 2017 Optimization of microroughness of replicated x-ray optics

Lenka Mikulickova, Ladislav Pina, Adolf Inneman, Daniela Doubravova, Veronika Marsikova, Ladislav Sieger, Martin Urban, Veronika Stehliková, Ondrej Nentvich, Jaromir Mirovsky

Author Affiliations +

Proceedings Volume 10235, EUV and X-ray Optics: Synergy between Laboratory and Space V; 102350A (2017) https://doi.org/10.1117/12.2265810
Event: SPIE Optics + Optoelectronics, 2017, Prague, Czech Republic

Abstract

We report on our work of minimizing the microroughness of replicated grazing incidence X-ray optics. Ion beam and RF sputter cleaning was used as surface treatment and we compare its effects in the article. Vacuum deposition of smoothing layers was also used for minimizing the microroughness. The surfaces were measured by atomic force microscopy and X-ray reflectometry. Microroughness less than 0,5 nm RMS and R_a was achieved.

Citation Download Citation

Lenka Mikulickova, Ladislav Pina, Adolf Inneman, Daniela Doubravova, Veronika Marsikova, Ladislav Sieger, Martin Urban, Veronika Stehliková, Ondrej Nentvich, and Jaromir Mirovsky "Optimization of microroughness of replicated x-ray optics", Proc. SPIE 10235, EUV and X-ray Optics: Synergy between Laboratory and Space V, 102350A (31 May 2017); https://doi.org/10.1117/12.2265810

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