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Polarization is a unique property of light, providing a number of advantages in optical metrology. In this talk, I will discuss principles and experimental results of polarization techniques in fringe project metrology and interferometric measurement.
Rongguang Liang
"Polarized metrology systems (Conference Presentation)", Proc. SPIE 10220, Dimensional Optical Metrology and Inspection for Practical Applications VI, 1022002 (6 June 2017); https://doi.org/10.1117/12.2264881
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Rongguang Liang, "Polarized metrology systems (Conference Presentation)," Proc. SPIE 10220, Dimensional Optical Metrology and Inspection for Practical Applications VI, 1022002 (6 June 2017); https://doi.org/10.1117/12.2264881