On-machine metrology system (Conference Presentation)

Hsiang Nan Cheng; Katherine Overend; Yu Zhang; Rongguang Liang

doi:10.1117/12.2264882

6 June 2017 On-machine metrology system (Conference Presentation)

Hsiang Nan Cheng, Katherine Overend, Yu Zhang, Rongguang Liang

Proceedings Volume 10220, Dimensional Optical Metrology and Inspection for Practical Applications VI; 102200G (2017) https://doi.org/10.1117/12.2264882
Event: SPIE Commercial + Scientific Sensing and Imaging, 2017, Anaheim, CA, United States

Abstract

Diamond turning is the powerful fabrication method for optics. Current process is very time consuming due to the lack of on-machine metrology. In this talk, we will first discuss the challenges and requirement of in-situ metrology, then we will present chromatic confocal on-machine metrology system developed in our lab and demonstrate its performance.

Conference Presentation

Citation Download Citation

Hsiang Nan Cheng, Katherine Overend, Yu Zhang, and Rongguang Liang "On-machine metrology system (Conference Presentation)", Proc. SPIE 10220, Dimensional Optical Metrology and Inspection for Practical Applications VI, 102200G (6 June 2017); https://doi.org/10.1117/12.2264882

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