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9 June 2017 Intelligent MEMS spectral sensor for NIR applications (Conference Presentation)
Uula Kantojärvi, Jarkko E. Antila, Jussi Mäkynen, Janne Suhonen
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Proceedings Volume 10210, Next-Generation Spectroscopic Technologies X; 102100B (2017) https://doi.org/10.1117/12.2262597
Event: SPIE Commercial + Scientific Sensing and Imaging, 2017, Anaheim, CA, United States
Abstract
Near Infrared (NIR) spectrometers have been widely used in many material inspection applications, but mainly in central laboratories. The role of miniaturization, robustness of spectrometer and portability are really crucial when field inspection tools should be developed. We present an advanced spectral sensor based on a tunable Microelectromechanical (MEMS) Fabry-Perot Interferometer which will meet these requirements. We describe the wireless device design, operation principle and easy-to-use algorithms to adapt the sensor to number of applications. Multiple devices can be operated simultaneously and seamlessly through cloud connectivity. We also present some practical NIR applications carried out with truly portable NIR device.
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Uula Kantojärvi, Jarkko E. Antila, Jussi Mäkynen, and Janne Suhonen "Intelligent MEMS spectral sensor for NIR applications (Conference Presentation)", Proc. SPIE 10210, Next-Generation Spectroscopic Technologies X, 102100B (9 June 2017); https://doi.org/10.1117/12.2262597
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KEYWORDS
Near infrared
Microelectromechanical systems
Sensors
Inspection
Intelligent sensors
Spectrometers
Clouds
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