Form error compensation of on-machine noncontact measurement of precision grinding for large and middle-diameter aspheric elements

Jianpu Xi; Dongxu Ren; Bin Li; Zexiang Zhao

doi:10.1117/12.2269672

13 June 2017 Form error compensation of on-machine noncontact measurement of precision grinding for large and middle-diameter aspheric elements

Jianpu Xi, Dongxu Ren, Bin Li, Zexiang Zhao

Author Affiliations +

Proceedings Volume 10449, Fifth International Conference on Optical and Photonics Engineering; 104490L (2017) https://doi.org/10.1117/12.2269672
Event: Fifth International Conference on Optical and Photonics Engineering, 2017, Singapore, Singapore

Abstract

Based on the cross grind ing mode for large-diameter aspheric, a high-precision profile error compensation method by using an on-machine noncontact measuring sensor is presented to improve the manufacturing accuracy and efficiency of large and middle-diameter aspheric elements. Profile errors arising from machine motion errors and tool offset errors are obtained through the measured data from on-machine noncontact measurement. By measuring a standard flat ruler, the motion errors of the measurement sensor from the machine positioning errors is calibrated, the grinding tool setting error could be calculated according to the on-machine coordinate to achieve the grinding tool offset quick eccentricity calibration. By comparing the measured profile and the ideal profile, the normal residual error of each grinding program point was calculated, and the new compensation path was generated thereafter. The 300-mm-diameter K9 mirror was ground to verify the proposed compensation grinding method. Results indicate that the profile error was reduced from 35μm to 10μm through the tool setting error elimination during semi-finish grinding stage. Using the compensation grinding path according to the normal residual error, the profile accuracy was improved from 10μm to 4μm in fine grinding stage. It could be concluded that the proposed compensation grinding method is effective to improve profile accuracy and manufacturing efficiency for the large and middle-diameter aspheric elements.

Citation Download Citation

Jianpu Xi, Dongxu Ren, Bin Li, and Zexiang Zhao "Form error compensation of on-machine noncontact measurement of precision grinding for large and middle-diameter aspheric elements", Proc. SPIE 10449, Fifth International Conference on Optical and Photonics Engineering, 104490L (13 June 2017); https://doi.org/10.1117/12.2269672

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
11 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Aspheric lenses

Calibration

Manufacturing

Motion measurement

Sensors

Error analysis

Mirrors

Show All Keywords

Keywords/Phrases

Search In:

Publication Years