Analysis on ultrashort-pulse laser ablation for nanoscale film of ceramics

C. Y. Ho; Y. H. Tsai; Y. J. Chiou

doi:10.1117/12.2270394

13 June 2017 Analysis on ultrashort-pulse laser ablation for nanoscale film of ceramics

C. Y. Ho, Y. H. Tsai, Y. J. Chiou

Proceedings Volume 10449, Fifth International Conference on Optical and Photonics Engineering; 104490X (2017) https://doi.org/10.1117/12.2270394
Event: Fifth International Conference on Optical and Photonics Engineering, 2017, Singapore, Singapore

Abstract

This paper uses the dual-phase-lag model to study the ablation characteristics of femtosecond laser processing for nanometer-sized ceramic films. In ultrafast process and ultrasmall size where the two lags occur, a dual-phase-lag can be applied to analyse the ablation characteristics of femtosecond laser processing for materials. In this work, the ablation rates of nanometer-sized lead zirconate titanate (PZT) ceramics are investigated using a dual-phase-lag and the model is solved by Laplace transform method. The results obtained from this work are validated by the available experimental data. The effects of material thermal properties on the ablation characteristics of femtosecond laser processing for ceramics are also discussed.

Citation Download Citation

C. Y. Ho, Y. H. Tsai, and Y. J. Chiou "Analysis on ultrashort-pulse laser ablation for nanoscale film of ceramics", Proc. SPIE 10449, Fifth International Conference on Optical and Photonics Engineering, 104490X (13 June 2017); https://doi.org/10.1117/12.2270394

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