Overview of variable-angle spectroscopic ellipsometry (VASE): II. Advanced applications

Blaine Johs; John A. Woollam; Craig M. Herzinger; James N. Hilfiker; Ron A. Synowicki; Corey L. Bungay

doi:10.1117/12.351667

19 July 1999 Overview of variable-angle spectroscopic ellipsometry (VASE): II. Advanced applications

Blaine Johs, John A. Woollam, Craig M. Herzinger, James N. Hilfiker, Ron A. Synowicki, Corey L. Bungay

Proceedings Volume 10294, Optical Metrology: A Critical Review; 1029404 (1999) https://doi.org/10.1117/12.351667
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

A preceding companion paper provides a general introduction to Variable Angle Spectroscopic Ellipsometry (VASE), and also describes many typical applications of the technique. In this paper, more advanced VASE applications are discussed. These applications rely on recent advances in ellipsometric hardware, which allow extremely accurate ellipsometric data to be acquired over a broad spectral range, from the IR to VUV. This instrumentation can also quantitatively measure the optical response of nonisotropic samples. Advanced data analysis techniques are also presented.

Citation Download Citation

Blaine Johs, John A. Woollam, Craig M. Herzinger, James N. Hilfiker, Ron A. Synowicki, and Corey L. Bungay "Overview of variable-angle spectroscopic ellipsometry (VASE): II. Advanced applications", Proc. SPIE 10294, Optical Metrology: A Critical Review, 1029404 (19 July 1999); https://doi.org/10.1117/12.351667

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