Polarization and phase shifting interferometry

Sergej Rothau; Klaus Mantel; Norbert Lindlein

doi:10.1117/12.2269720

26 June 2017 Polarization and phase shifting interferometry

Sergej Rothau, Klaus Mantel, Norbert Lindlein

Proceedings Volume 10329, Optical Measurement Systems for Industrial Inspection X; 1032903 (2017) https://doi.org/10.1117/12.2269720
Event: SPIE Optical Metrology, 2017, Munich, Germany

Abstract

This publication presents a novel interferometric method for the simultaneous measurement of the phase and state of polarization of a light wave with arbitrary, in particular locally varying elliptical polarization. The mea- surement strategy is based on variations of the reference wave concerning phase and polarization and processing the interference patterns so obtained. With this method, that is very similar to the classical phase shifting interferometry, a complete analysis of spatially variant states of polarization and their phase fronts can be done in one measurement cycle. Furthermore, a direct analysis of specimens under test regarding birefringence and the impact on the phase of the incoming light can be realized. The theoretical description of the investigated methods and their experimental implementation are presented.

Citation Download Citation

Sergej Rothau, Klaus Mantel, and Norbert Lindlein "Polarization and phase shifting interferometry", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 1032903 (26 June 2017); https://doi.org/10.1117/12.2269720

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