Full-field heterodyne dynamic interferometry based on hertz-level low differential-frequency acousto-optic frequency shifter

Zhou Wu; Wenxi Zhang; Bin Xiangli; Xinxin Kong

doi:10.1117/12.2270138

26 June 2017 Full-field heterodyne dynamic interferometry based on hertz-level low differential-frequency acousto-optic frequency shifter

Zhou Wu, Wenxi Zhang, Bin Xiangli, Xinxin Kong

Author Affiliations +

Proceedings Volume 10329, Optical Measurement Systems for Industrial Inspection X; 1032905 (2017) https://doi.org/10.1117/12.2270138
Event: SPIE Optical Metrology, 2017, Munich, Germany

Abstract

High precision measurement of optical elements with long focal length is affected by vibration, airflow and other environmental factors due to the long cavity length, which has been difficulty and hot issue in optical machining and detection. In order to overcome the difficulties of high precision measurement of optical elements with long focal length, the paper proposes a full-field heterodyne interferometric measurement technique that could effectively suppress the environmental interference. In the early related research, a series of Hertz-level high-stability, low-differential frequency acousto-optic frequency shifters were successfully developed, which could be applied to heterodyne interferometry, instead of traditional phase-shifting intererometry. On this basis, a full-field heterodyne interference measurement system is developed, using array detector with conventional frame rate for full-field detection, to solve the problem of different optical paths of reference light and measuring light in dynamic interferometers. It could effectively suppress the vibration, noise, airflow and other factors, and thus significantly improve measurement accuracy and environmental adaptability. In typical environment with vibration and airflow, our measurement system can achieve technical indicators as follows: surface measurement accuracy is better than λ/1000 and repeated measurement accuracy is better than 5λ/10000. Thereby the new full-field heterodyne interferometry could be applied to dynamic measurement of large-diameter optical components and systems quality inspection, system installation correction, on-line measurement and other areas.

Citation Download Citation

Zhou Wu, Wenxi Zhang, Bin Xiangli, and Xinxin Kong "Full-field heterodyne dynamic interferometry based on hertz-level low differential-frequency acousto-optic frequency shifter", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 1032905 (26 June 2017); https://doi.org/10.1117/12.2270138

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