Spatial-temporal phase shifting interferometry: suppressing phase errors in dynamic Fizeau interferometer

Wenhua Zhu; Lei Chen; Rihong Zhu; Rui Zhang; Donghui Zheng

doi:10.1117/12.2271189

26 June 2017 Spatial-temporal phase shifting interferometry: suppressing phase errors in dynamic Fizeau interferometer

Wenhua Zhu, Lei Chen, Rihong Zhu, Rui Zhang, Donghui Zheng

Proceedings Volume 10329, Optical Measurement Systems for Industrial Inspection X; 1032909 (2017) https://doi.org/10.1117/12.2271189
Event: SPIE Optical Metrology, 2017, Munich, Germany

Abstract

A spatial-temporal phase shifting interferometry is proposed to suppress the phase errors in dynamic Fizeau interferometer. The process of phase errors suppression in this interferometry includes three steps: (1) utilizing the spatial phase shifting interferometry to calculate the initial phase; (2) viewing all the effects of the error sources as a complex; (3) utilizing the temporal phase shifting interferometry to obtain multiple different initial phases and calculate the average phase. Experimentally, the phase errors are suppressed effectively and the measurement results are in good agreement with those obtained by Zygo GPI interferometer, which verifies that the proposed interferometry is a powerful tool for phase errors suppression in dynamic interferometer.

Citation Download Citation

Wenhua Zhu, Lei Chen, Rihong Zhu, Rui Zhang, and Donghui Zheng "Spatial-temporal phase shifting interferometry: suppressing phase errors in dynamic Fizeau interferometer", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 1032909 (26 June 2017); https://doi.org/10.1117/12.2271189

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available