Digital holography on moving objects: multiwavelength height measurements on inclined surfaces

Annelie Schiller; Tobias Beckmann; Markus Fratz; Dominik Belzer; Alexander Bertz; Daniel Carl; Karsten Buse

doi:10.1117/12.2270176

26 June 2017 Digital holography on moving objects: multiwavelength height measurements on inclined surfaces

Annelie Schiller, Tobias Beckmann, Markus Fratz, Dominik Belzer, Alexander Bertz, Daniel Carl, Karsten Buse

Proceedings Volume 10329, Optical Measurement Systems for Industrial Inspection X; 103290D (2017) https://doi.org/10.1117/12.2270176
Event: SPIE Optical Metrology, 2017, Munich, Germany

Abstract

Multiwavelength digital holography on moving objects enables fast and precise inline-measurements of surface pro files. Due to the use of multiple wavelengths, optically rough surfaces with structure heights in the micrometer range can be mapped unambiguously. In this work we explore the influence of the object velocity on height measurements on inclined surfaces. We show measurements using spatial-phase-shifting holography employing two wavelengths and object velocities of up to 90 mm/s with eye-safe cw-lasers with less than 1 mW of laser light. Despite motion blur exceeding the mean speckle size, reliable height measurements can be conducted at these velocities. The height map of a metal cone with two different slope angles (1° , 10° ) is measured at an exposure time of 2 ms. Using line shaped illumination, each frame yields a height map of approximately 2 x 17 mm². The overlap between the frames allows averaging as the image is put together, improving data quality. The mean repeatability of the height information in the investigated setup is better than 4.5 µm at a synthetic wavelength of 214 µm.

Citation Download Citation

Annelie Schiller, Tobias Beckmann, Markus Fratz, Dominik Belzer, Alexander Bertz, Daniel Carl, and Karsten Buse "Digital holography on moving objects: multiwavelength height measurements on inclined surfaces", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 103290D (26 June 2017); https://doi.org/10.1117/12.2270176

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
7 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Digital holography

Image quality

Holography

Metals

Motion measurement

Speckle

Holographic interferometry

Show All Keywords

Keywords/Phrases

Search In:

Publication Years