Surface profile measurement by using the integrated Linnik WLSI and confocal microscope system

Wei-Chung Wang; Ming-Hsing Shen; Chi-Hung Hwang; Yun-Ting Yu; Tzu-Fong Wang

doi:10.1117/12.2270195

26 June 2017 Surface profile measurement by using the integrated Linnik WLSI and confocal microscope system

Wei-Chung Wang, Ming-Hsing Shen, Chi-Hung Hwang, Yun-Ting Yu, Tzu-Fong Wang

Proceedings Volume 10329, Optical Measurement Systems for Industrial Inspection X; 103291A (2017) https://doi.org/10.1117/12.2270195
Event: SPIE Optical Metrology, 2017, Munich, Germany

Abstract

The white-light scanning interferometer (WLSI) and confocal microscope (CM) are the two major optical inspection systems for measuring three-dimensional (3D) surface profile (SP) of micro specimens. Nevertheless, in practical applications, WLSI is more suitable for measuring smooth and low-slope surfaces. On the other hand, CM is more suitable for measuring uneven-reflective and low-reflective surfaces. As for aspect of surface profiles to be measured, the characteristics of WLSI and CM are also different. WLSI is generally used in semiconductor industry while CM is more popular in printed circuit board industry. In this paper, a self-assembled multi-function optical system was integrated to perform Linnik white-light scanning interferometer (Linnik WLSI) and CM. A connecting part composed of tubes, lenses and interferometer was used to conjunct finite and infinite optical systems for Linnik WLSI and CM in the self-assembled optical system. By adopting the flexibility of tubes and lenses, switching to perform two different optical measurements can be easily achieved. Furthermore, based on the shape from focus method with energy of Laplacian filter, the CM was developed to enhance the on focal information of each pixel so that the CM can provide all-in-focus image for performing the 3D SP measurement and analysis simultaneously. As for Linnik WLSI, eleven-step phase shifting algorithm was used to analyze vertical scanning signals and determine the 3D SP.

Citation Download Citation

Wei-Chung Wang, Ming-Hsing Shen, Chi-Hung Hwang, Yun-Ting Yu, and Tzu-Fong Wang "Surface profile measurement by using the integrated Linnik WLSI and confocal microscope system", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 103291A (26 June 2017); https://doi.org/10.1117/12.2270195

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