Optical exploration of micro/nanoscale irregularities created on metallic surfaces by femtosecond laser irradiation

H. Ahmadi Rashtabadi; M. Mollabashi; S. Razi

doi:10.1117/12.2270102

26 June 2017 Optical exploration of micro/nanoscale irregularities created on metallic surfaces by femtosecond laser irradiation

H. Ahmadi Rashtabadi, M. Mollabashi, S. Razi

Author Affiliations +

Proceedings Volume 10329, Optical Measurement Systems for Industrial Inspection X; 103293T (2017) https://doi.org/10.1117/12.2270102
Event: SPIE Optical Metrology, 2017, Munich, Germany

Abstract

In this paper, we suggest a direct method based on light scattering and Beckmann formulation for the coarse surface RMS roughness and correlation length measurements. Metallic steel samples irradiated under controlled interaction conditions with ultrafast femtosecond laser system are selected as the random rough surfaces for investigation. Stabilized low-intensity He-Ne laser and an appropriate power meter are selected as the main elements of the experimental measurement probe. The light source and detector are located symmetrically around the surface normal and the reflected light is collected to be used in Beckmann formulation. In this regard, the dependency of the surface scattering to the illumination angle is also investigated. Atomic Force Microscopy and Scanning Electron Microscopy are utilized as standard common methods to extract the surface features and check the reliability of the theoretical approach.

Citation Download Citation

H. Ahmadi Rashtabadi, M. Mollabashi, and S. Razi "Optical exploration of micro/nanoscale irregularities created on metallic surfaces by femtosecond laser irradiation", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 103293T (26 June 2017); https://doi.org/10.1117/12.2270102

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