Evaluation of laser ablation crater relief by white light micro interferometer

Igor Gurov; Mikhail Volkov; Ekaterina Zhukova; Nikita Ivanov; Nikita Margaryants; Andrey Potemkin; Andrey Samokhvalov; Svetlana Shelygina

doi:10.1117/12.2272022

26 June 2017 Evaluation of laser ablation crater relief by white light micro interferometer

Igor Gurov, Mikhail Volkov, Ekaterina Zhukova, Nikita Ivanov, Nikita Margaryants, Andrey Potemkin, Andrey Samokhvalov, Svetlana Shelygina

Author Affiliations +

Proceedings Volume 10329, Optical Measurement Systems for Industrial Inspection X; 103294I (2017) https://doi.org/10.1117/12.2272022
Event: SPIE Optical Metrology, 2017, Munich, Germany

Abstract

A multi-view scanning method is suggested to assess a complicated surface relief by white light interferometer. Peculiarities of the method are demonstrated on a special object in the form of quadrangular pyramid cavity, which is formed at measurement of micro-hardness of materials using a hardness gauge. An algorithm of the joint processing of multi-view scanning results is developed that allows recovering correct relief values. Laser ablation craters were studied experimentally, and their relief was recovered using the developed method. It is shown that the multi-view scanning reduces ambiguity when determining the local depth of the laser ablation craters micro relief. Results of experimental studies of the multi-view scanning method and data processing algorithm are presented.

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Igor Gurov, Mikhail Volkov, Ekaterina Zhukova, Nikita Ivanov, Nikita Margaryants, Andrey Potemkin, Andrey Samokhvalov, and Svetlana Shelygina "Evaluation of laser ablation crater relief by white light micro interferometer", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 103294I (26 June 2017); https://doi.org/10.1117/12.2272022

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