Potential of LIGA technology for optoelectronic interconnects

W. Bacher; Peter Bley; Herbert O. Moser

doi:10.1117/12.229277

30 January 1996 Potential of LIGA technology for optoelectronic interconnects

W. Bacher, Peter Bley, Herbert O. Moser

Proceedings Volume 10284, Optoelectronic Interconnects and Packaging: A Critical Review; 102840R (1996) https://doi.org/10.1117/12.229277
Event: Photonics West '96, 1996, San Jose, CA, United States

Abstract

LIGA is a fabrication technology suitable for mass producing high aspect-ratio microstructured components with nearly arbitrary 3D shapes in almost any material. The acronym stems from the German words for lithography, electroforming, and plastic molding. Fabricating highly parallel microoptical systems either for guided-wave or for free-space light transmission by LIGA technology may turn out to be a cost-effective way to satisfy optical interconnect demands.

Citation Download Citation

W. Bacher, Peter Bley, and Herbert O. Moser "Potential of LIGA technology for optoelectronic interconnects", Proc. SPIE 10284, Optoelectronic Interconnects and Packaging: A Critical Review, 102840R (30 January 1996); https://doi.org/10.1117/12.229277

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