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Proceedings Article

Silicon-on-insulator nanopillar-array optical sensor

[+] Author Affiliations
Tao Xu

Canadian Solar Inc. (China)

Michelle Xu, Priyadarshini Kumari, Stewart Aitchison, Harry Ruda

Univ. of Toronto (Canada)

Ning Zhu, Lech Wosinski

Royal Institute of Technology (Sweden) and Zhejiang Univ. (China)

Proc. SPIE 7908, Nanoscale Imaging, Sensing, and Actuation for Biomedical Applications VIII, 79080O (February 11, 2011); doi:10.1117/12.874099
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From Conference Volume 7908

  • Nanoscale Imaging, Sensing, and Actuation for Biomedical Applications VIII
  • Alexander N. Cartwright; Dan V. Nicolau
  • San Francisco, California, USA | January 22, 2011

abstract

Pillar-array based optical cavities have unique properties, e.g., having a large and connected low dielectric index space (normally air space), having a large percent of electric field energy in air and standing on a substrate. These properties make them well suitable to make ultra compact and highly sensitive label-free optical sensors to detect bio-/chemical reactions. We designed, fabricated, and measured a silicon-on-insulator pillar array microcavity that possesses a quality factor as high as 27,600. We studied its sensitivity for both bulk index change and surface index modification. As a bulk index sensor, for environmental refractive index change of 0.01, a resonance peak wavelength shift of 3.5 nm was measured. As a surface index sensor, the simulations show, for a coating with thickness of 1 nm, the resonance wavelength shifts as large as 2.86 nm. Combining with a sharp 0.06 nm wide resonance peak, our pillar-array sensor is able to resolve ultra small bulk and surface refractive index changes caused by target molecules.

© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation

Tao Xu ; Michelle Xu ; Ning Zhu ; Priyadarshini Kumari ; Lech Wosinski, et al.
"Silicon-on-insulator nanopillar-array optical sensor", Proc. SPIE 7908, Nanoscale Imaging, Sensing, and Actuation for Biomedical Applications VIII, 79080O (February 11, 2011); doi:10.1117/12.874099; http://dx.doi.org/10.1117/12.874099


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