MEMS measurement by optical holography method

R. Dauksevicius; V. Ostasevicius; A. Palevicius; M. Ragulskis; R. Palevicius

doi:10.1117/12.629730

7 November 2005 MEMS measurement by optical holography method

R. Dauksevicius, V. Ostasevicius, A. Palevicius, M. Ragulskis, R. Palevicius

Proceedings Volume 6000, Two- and Three-Dimensional Methods for Inspection and Metrology III; 60000O (2005) https://doi.org/10.1117/12.629730
Event: Optics East 2005, 2005, Boston, MA, United States

Abstract

Investigation of dynamics of microelectromechanical systems (MEMS) is an important problem from the point view of engineering, technology and metrology. Due to high surface to volume ratio of micro-electromechanical systems (MEMS), more attention must be paid to control their surface characteristics. Time average optical holography - has found many industrial applications and still is a promising method (like others: laser interferometry in small object displacement analysis.) This technique can reveal the shape, direction, and magnitude of the stress induced displacement in the structure under study. In this way, time average holography is a powerful tool for analysis of micro scale vibrations. The threshold of sensitivity of this measurement technique is defined by the magnitude of the wavelength of the illuminating laser beam. Also, this is a full field non-destructive technique capable to register the motion of the whole surface instead of a single point. The time average holography method is proposed to control kinetics of oscillations of the micro scale object, operating at the different amplitudes of periodical excitation. Theoretical calculations as well as experimental verification are described.

Citation Download Citation

R. Dauksevicius, V. Ostasevicius, A. Palevicius, M. Ragulskis, and R. Palevicius "MEMS measurement by optical holography method", Proc. SPIE 6000, Two- and Three-Dimensional Methods for Inspection and Metrology III, 60000O (7 November 2005); https://doi.org/10.1117/12.629730

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