Optimization methods of hologram for holographic femtosecond laser processing

Yoshio Hayasaki; Satoshi Hasegawa

doi:10.1117/12.873487

21 February 2011 Optimization methods of hologram for holographic femtosecond laser processing

Yoshio Hayasaki, Satoshi Hasegawa

Proceedings Volume 7920, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI; 79200Q (2011) https://doi.org/10.1117/12.873487
Event: SPIE LASE, 2011, San Francisco, California, United States

Abstract

In holographic femtosecond laser processing, a precise control of the diffraction peaks generated by a computergenerated hologram (CGH) displayed on a liquid crystal spatial light modulator is very important. We developed some design methods of the CGH. We developed a method that the CGH was optimized with based on an optical measurement of the diffraction peak intensities. Recently we also developed the second harmonic optimization based on the second harmonic generations induced by parallel femtosecond laser pulses. In our presentation, our recent progresses of the CGH optimization for holographic femtosecond laser processing are demonstrated.

Citation Download Citation

Yoshio Hayasaki and Satoshi Hasegawa "Optimization methods of hologram for holographic femtosecond laser processing", Proc. SPIE 7920, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI, 79200Q (21 February 2011); https://doi.org/10.1117/12.873487

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