Processing of metals with ps-laser pulses in the range between 10ps and 100ps

Marc Schmid; Beat Neuenschwander; Valerio Romano; Beat Jaeggi; Urs W. Hunziker

doi:10.1117/12.879498

21 February 2011 Processing of metals with ps-laser pulses in the range between 10ps and 100ps

Marc Schmid, Beat Neuenschwander, Valerio Romano, Beat Jaeggi, Urs W. Hunziker

Proceedings Volume 7920, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI; 792009 (2011) https://doi.org/10.1117/12.879498
Event: SPIE LASE, 2011, San Francisco, California, United States

Abstract

The potential of pulsed laser system in the range of 10ps to 100ps pulse duration for material processing has been further investigated. In detail the dependency of the volume ablation rate, penetration depth and threshold fluence on the pulse duration and number of pulses applied to the material will be discussed. The experimental results show that in the case of copper and steel, better results in quality and efficiency of the ablated material are achieved with shorter pulse durations.

Citation Download Citation

Marc Schmid, Beat Neuenschwander, Valerio Romano, Beat Jaeggi, and Urs W. Hunziker "Processing of metals with ps-laser pulses in the range between 10ps and 100ps", Proc. SPIE 7920, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI, 792009 (21 February 2011); https://doi.org/10.1117/12.879498

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