MEMS product engineering: methodology and tools

Dirk Ortloff; Jens Popp; Thilo Schmidt; Kai Hahn; Matthias Mielke; Rainer Brück

doi:10.1117/12.876104

14 February 2011 MEMS product engineering: methodology and tools

Dirk Ortloff, Jens Popp, Thilo Schmidt, Kai Hahn, Matthias Mielke, Rainer Brück

Proceedings Volume 7926, Micromachining and Microfabrication Process Technology XVI; 79260D (2011) https://doi.org/10.1117/12.876104
Event: SPIE MOEMS-MEMS, 2011, San Francisco, California, United States

Abstract

The development of MEMS comprises the structural design as well as the definition of an appropriate manufacturing process. Technology constraints have a considerable impact on the device design and vice-versa. Product design and technology development are therefore concurrent tasks. Based on a comprehensive methodology the authors introduce a software environment that links commercial design tools from both area into a common design flow. In this paper emphasis is put on automatic low threshold data acquisition. The intention is to collect and categorize development data for further developments with minimum overhead and minimum disturbance of established business processes. As a first step software tools that automatically extract data from spreadsheets or file-systems and put them in context with existing information are presented. The developments are currently carried out in a European research project.

Citation Download Citation

Dirk Ortloff, Jens Popp, Thilo Schmidt, Kai Hahn, Matthias Mielke, and Rainer Brück "MEMS product engineering: methodology and tools", Proc. SPIE 7926, Micromachining and Microfabrication Process Technology XVI, 79260D (14 February 2011); https://doi.org/10.1117/12.876104

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