Computer-controlled cylindrical polishing process for development of grazing incidence optics for the hard x-ray region

Gufran S. Khan; Mikhail Gubarev; Chet Speegle; Brian Ramsey

doi:10.1117/12.862635

29 September 2010 Computer-controlled cylindrical polishing process for development of grazing incidence optics for the hard x-ray region

Gufran S. Khan, Mikhail Gubarev, Chet Speegle, Brian Ramsey

Author Affiliations +

Proceedings Volume 7802, Advances in X-Ray/EUV Optics and Components V; 78020H (2010) https://doi.org/10.1117/12.862635
Event: SPIE Optical Engineering + Applications, 2010, San Diego, California, United States

Abstract

The focusing performance of shell optics for the hard X-ray region strongly depends on their axial mid-spatialfrequency- range figure errors. This paper presents the development of a deterministic computer-controlled polishing process to minimize these axial figure errors on cylindrical shaped mandrels from which the mirror shells are replicated. A mathematical model has been developed to simulate the residual surface figure errors due to the polishing process parameters and the polishing tools used, along with their non-conformance to the mandrel. We present design considerations of a large-size polishing lap where the experimentally determined process variables have been used for optimizing the lap configuration and the machine operational parameters. Furthermore, the developed model is capable of generating a corrective polishing sequence for a known surface error profile. Practical polishing experiments have been performed to verify the model and to determine its ability to correct known axial figure errors through polishing machine control.

Citation Download Citation

Gufran S. Khan, Mikhail Gubarev, Chet Speegle, and Brian Ramsey "Computer-controlled cylindrical polishing process for development of grazing incidence optics for the hard x-ray region", Proc. SPIE 7802, Advances in X-Ray/EUV Optics and Components V, 78020H (29 September 2010); https://doi.org/10.1117/12.862635

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