Compact extreme ultraviolet source by use of a discharge-produced potassium plasma for surface morphology application

Hiromitsu Terauchi; Mami Yamaguchi; Keisuke Kikuchi; Takamitsu Otsuka; Takeshi Higashiguchi; Noboru Yugami; Toyohiko Yatagai; Padraig Dunne; Gerry O'Sullivan

doi:10.1117/12.858603

25 August 2010 Compact extreme ultraviolet source by use of a discharge-produced potassium plasma for surface morphology application

Hiromitsu Terauchi, Mami Yamaguchi, Keisuke Kikuchi, Takamitsu Otsuka, Takeshi Higashiguchi, Noboru Yugami, Toyohiko Yatagai, Padraig Dunne, Gerry O'Sullivan

Author Affiliations +

Proceedings Volume 7802, Advances in X-Ray/EUV Optics and Components V; 78020T (2010) https://doi.org/10.1117/12.858603
Event: SPIE Optical Engineering + Applications, 2010, San Diego, California, United States

Abstract

We have reported a discharge-produced plasma extreme ultraviolet source based on a pure potassium vapor. Potassium ions produced strong broadband emission around 40 nm with a bandwidth of 8 nm [full width at halfmaximum (FWHM)]. The current-voltage characteristics of discharge suggest that the source operates in a hollow cathode mode. By comparison with atomic structure calculations, the broadband emission is found to be primarily due to 3d-3p transitions in potassium ions ranging from K ²⁺ to K⁴⁺.

Citation Download Citation

Hiromitsu Terauchi, Mami Yamaguchi, Keisuke Kikuchi, Takamitsu Otsuka, Takeshi Higashiguchi, Noboru Yugami, Toyohiko Yatagai, Padraig Dunne, and Gerry O'Sullivan "Compact extreme ultraviolet source by use of a discharge-produced potassium plasma for surface morphology application", Proc. SPIE 7802, Advances in X-Ray/EUV Optics and Components V, 78020T (25 August 2010); https://doi.org/10.1117/12.858603

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