Development of chipscale chalcogenide glass based infrared chemical sensors

Juejun Hu; J. David Musgraves; Nathan Carlie; Bogdan Zdyrko; Igor Luzinov; Anu Agarwal; Kathleen Richardson; Lionel Kimerling

doi:10.1117/12.871399

24 January 2011 Development of chipscale chalcogenide glass based infrared chemical sensors

Juejun Hu, J. David Musgraves, Nathan Carlie, Bogdan Zdyrko, Igor Luzinov, Anu Agarwal, Kathleen Richardson, Lionel Kimerling

Author Affiliations +

Proceedings Volume 7945, Quantum Sensing and Nanophotonic Devices VIII; 79452C (2011) https://doi.org/10.1117/12.871399
Event: SPIE OPTO, 2011, San Francisco, California, United States

Abstract

In this paper, we review the design, processing, and characterization of novel planar infrared chemical sensors. Chalcogenide glasses are identified as the material of choice for sensing given their wide infrared transparency as well as almost unlimited capacity for composition alloying and property tailoring. Three generations of on-chip spectroscopic chemical sensor devices we have developed: waveguide evanescent sensors, micro-disk cavity-enhanced sensors and micro-cavity photothermal sensors are discussed.

Citation Download Citation

Juejun Hu, J. David Musgraves, Nathan Carlie, Bogdan Zdyrko, Igor Luzinov, Anu Agarwal, Kathleen Richardson, and Lionel Kimerling "Development of chipscale chalcogenide glass based infrared chemical sensors", Proc. SPIE 7945, Quantum Sensing and Nanophotonic Devices VIII, 79452C (24 January 2011); https://doi.org/10.1117/12.871399

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