Optical properties of annealed silicon rich oxide (SRO) films

A. Luna-López; M. Aceves-Mijares; O. Malik; J. Pedraza; C. Falcony

doi:10.1117/12.667675

3 February 2006 Optical properties of annealed silicon rich oxide (SRO) films

A. Luna-López, M. Aceves-Mijares, O. Malik, J. Pedraza, C. Falcony

Proceedings Volume 6029, ICO20: Materials and Nanostructures; 60290E (2006) https://doi.org/10.1117/12.667675
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

Silicon Rich Oxide (SRO) has luminescent properties that can be used in silicon optoelectronics devices. Nowadays the emission mechanisms are not completely understood, leading to a high potential field of research. The study of the SRO characteristics and its relation with the emission would provide information on the mechanism of radiation. In this work the optical properties of SRO are studied. Photoluminescence (PL), transmittance and refractive index of silicon rich oxide films annealed at high temperature during different times have been obtained. PL spectra show a considerable emission of visible light with different thermal treatment times and have a wide wavelength spectrum from 400 to 600 nm (3.1-2 eV ) and 650 to 850 nm (1.9-1.45 eV). Absorption spectra were studied and the optical band gap was determined. It can be seen that the optical band gap determined from these spectra changes as the silicon excess varies. The refractive index of SRO films also augments with the excess of silicon, and with the thermal treatments time.

Citation Download Citation

A. Luna-López, M. Aceves-Mijares, O. Malik, J. Pedraza, and C. Falcony "Optical properties of annealed silicon rich oxide (SRO) films", Proc. SPIE 6029, ICO20: Materials and Nanostructures, 60290E (3 February 2006); https://doi.org/10.1117/12.667675

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