Paper
1 February 2006 Circular gratings based on binary optics and their diffraction computer simulation
Hauming Wu, Xingdao He, Yongqing Gong, Ningning Luo, Qi Jin
Author Affiliations +
Proceedings Volume 6034, ICO20: Optical Design and Fabrication; 603419 (2006) https://doi.org/10.1117/12.668142
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China
Abstract
This paper presents a novel method to fabricate circular gratings based on binary optics. A smart digital micro-mirror device (DMD) laser writing system is used to fabricate circular gratings. By use of the DMD system, we are capable of making low-cost and useful circular gratings easily. Their levels and radii can be controlled and be suited for many optical systems. Experiment results have been obtained with two and four levels. In this paper, it will also show a method of simulating circular gratings' diffraction. Using the simulation method, we can value and check the diffraction effect of circular gratings to rectify the design parameters.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hauming Wu, Xingdao He, Yongqing Gong, Ningning Luo, and Qi Jin "Circular gratings based on binary optics and their diffraction computer simulation", Proc. SPIE 6034, ICO20: Optical Design and Fabrication, 603419 (1 February 2006); https://doi.org/10.1117/12.668142
Lens.org Logo
CITATIONS
Cited by 1 scholarly publication.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Diffraction

Digital micromirror devices

Diffraction gratings

Micromirrors

Photoresist materials

Photomasks

Optical components

Back to Top