Paper
5 January 2006 Modeling, design and simulation of tunable band pass filter using RF MEMS capacitance and transmission line
Shimul Chandra Saha, Ulrik Hanke, Trond Sæther
Author Affiliations +
Proceedings Volume 6035, Microelectronics: Design, Technology, and Packaging II; 60350C (2006) https://doi.org/10.1117/12.638511
Event: Microelectronics, MEMS, and Nanotechnology, 2005, Brisbane, Australia
Abstract
In this paper we have shown design of a RF MEMS band pass filter. A high capacitance ratio and low actuation voltage RF MEMS shunt switch was designed and modeled the switch as a variable capacitance. The capacitance can be varied as a function of the actuation voltage. The capacitance is modeled as a lumped component, as used in a conventional LC filter. The design uses a novel approach to implement both distributed transmission line and RF MEMS capacitance together to replace the lumped elements. The use of RF MEMS variable capacitance gives the flexibility of tuning the cut-off and center frequency of bandpass filter. In this paper we show a design of 5.8 GHz center frequency band pass filter using the theory of stepped impedance transmission line and MEMS capacitance filter.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shimul Chandra Saha, Ulrik Hanke, and Trond Sæther "Modeling, design and simulation of tunable band pass filter using RF MEMS capacitance and transmission line", Proc. SPIE 6035, Microelectronics: Design, Technology, and Packaging II, 60350C (5 January 2006); https://doi.org/10.1117/12.638511
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Cited by 9 scholarly publications.
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KEYWORDS
Capacitance

Switches

Capacitors

Linear filtering

Microelectromechanical systems

Digital filtering

Bandpass filters

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