Photovoltaic effect of ferroelectric PLZT in a layered and preferentially oriented film

Masaaki Ichiki; Harumi Furue; Takeshi Kobayashi; Yasushi Morikawa; Takeshi Nakada; Chiaki Endo; Kazuhiro Nonaka; Ryutaro Maeda

doi:10.1117/12.638323

5 January 2006 Photovoltaic effect of ferroelectric PLZT in a layered and preferentially oriented film

Masaaki Ichiki, Harumi Furue, Takeshi Kobayashi, Yasushi Morikawa, Takeshi Nakada, Chiaki Endo, Kazuhiro Nonaka, Ryutaro Maeda

Author Affiliations +

Proceedings Volume 6035, Microelectronics: Design, Technology, and Packaging II; 60350P (2006) https://doi.org/10.1117/12.638323
Event: Microelectronics, MEMS, and Nanotechnology, 2005, Brisbane, Australia

Abstract

Photovoltaic (Pb,La)(Zr,Ti)O₃ (PLZT) films in a layered structure of different crystallographic orientations are fabricated by an optimized metalorganic deposition (MOD) method. Such films of (001) orientation exhibit a photovoltaic electrical power of approximately 20 times higher than that of random films. The anisotropic optical properties of the oriented films, including dark conductivity, photoconductivity and photovoltaic tensor surfaces, are obtained quantitatively. These results show that the photovoltaic output current and power of the oriented films are highly improved to be equal to those of semiconductors and suitable for application in the optical sensor of micro-electro-mechanical systems (MEMS).

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Masaaki Ichiki, Harumi Furue, Takeshi Kobayashi, Yasushi Morikawa, Takeshi Nakada, Chiaki Endo, Kazuhiro Nonaka, and Ryutaro Maeda "Photovoltaic effect of ferroelectric PLZT in a layered and preferentially oriented film", Proc. SPIE 6035, Microelectronics: Design, Technology, and Packaging II, 60350P (5 January 2006); https://doi.org/10.1117/12.638323

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